JPS6183028U - - Google Patents
Info
- Publication number
- JPS6183028U JPS6183028U JP16832684U JP16832684U JPS6183028U JP S6183028 U JPS6183028 U JP S6183028U JP 16832684 U JP16832684 U JP 16832684U JP 16832684 U JP16832684 U JP 16832684U JP S6183028 U JPS6183028 U JP S6183028U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- control unit
- gas
- furnace
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000002950 deficient Effects 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16832684U JPS6183028U (en]) | 1984-11-06 | 1984-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16832684U JPS6183028U (en]) | 1984-11-06 | 1984-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6183028U true JPS6183028U (en]) | 1986-06-02 |
Family
ID=30726102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16832684U Pending JPS6183028U (en]) | 1984-11-06 | 1984-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183028U (en]) |
-
1984
- 1984-11-06 JP JP16832684U patent/JPS6183028U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6183028U (en]) | ||
| JPS61164027U (en]) | ||
| JPS59172241U (ja) | 燃料パ−ジ装置 | |
| JPS59131149U (ja) | 半導体装置製造用ガス供給装置 | |
| JPS58120436U (ja) | 液中加熱装置 | |
| JPH0331U (en]) | ||
| JPS6415712U (en]) | ||
| JPH0252433U (en]) | ||
| JPS62150518U (en]) | ||
| JPS6210458U (en]) | ||
| JPS63116743U (en]) | ||
| JPS5851016U (ja) | エンジンノ二次エア供給装置 | |
| JPS6456827U (en]) | ||
| JPS6245533U (en]) | ||
| JPS6010312U (ja) | ガス流量調整装置 | |
| JPS6043118U (ja) | 点火プラグ周辺の換気装置 | |
| JPS60181559U (ja) | 燃焼装置 | |
| JPS6198868U (en]) | ||
| JPS6220777U (en]) | ||
| JPH0171442U (en]) | ||
| JPS5967678U (ja) | エアシリンダ制御用電磁弁の消音装置 | |
| JPS5958938U (ja) | 低圧処理装置 | |
| JPS63147813U (en]) | ||
| JPS63150363U (en]) | ||
| JPH01162264U (en]) |